摘  要：介绍了驻极体微电机、静电感应微电机、电晕微电机、磁阻微电机、永磁微电机、超声波微电机、分子马达和纳米马达等几种微电机的结构、原理、技术指标和国内外发展应用概况。
关键词：微电机；微机电系统；微机械；驻极体；分子马达

Abstract: Introduced the essential principle,construction,parameter of electrets micromotor,corona micromotor,reluctance micromotor,permanent magnetic micromotor,piezoelectric ultrasonic micromotor,molecular micromotor and nanomotor.Described research situation,development prospect and the application at home and abroad in this paper.
Key Words: Micromotor；Micro-electromechanical systems；Micro-machinery；Electrets；Molecular motor