摘  要：提出了实现磁悬浮运动平台水平力和悬浮力解耦的有限元分析方法。介绍了二维磁悬浮运动平台的组成结构和工作原理，给出了力解耦理论模型。将磁悬浮直线电机看做是载流设备，采用有限元方法计算其洛伦兹力密度，对电磁力的非线性因素和三相交流驱动的解耦力模型进行了分析。结果表明，根据移动平台位置信息施加不同的三相交流电流可以实现水平力和悬浮力的动态解耦。该方法对磁悬浮运动平台的控制研究有一定意义。
关键词：磁悬浮运动平台; 电磁力; 有限元方法; 解耦

Abstract: The FEM analysis for decoupling the horizontal force and levitation force of the maglev motion stage was proposed. The composition and working principle of two-dimensional maglev motion stage were introduced, and the force decoupling theoretical model was put forward. The maglev linear motor was used as a current-carrying equipment, its lorentz force density was calculated with the FEM, and the nonlinearity factors of the electromagnetic force and the decoupling force model drived with three-phase ac were analysed. The results indicate that the dynamic decoupling of the horizontal force and levitation force can be realized according to stage position by applying different AC currents. This method has certain significance for the control research of the maglev motion stages.
Key words: magnet levitation motion stage; electromagnetic force; FEM; decoupling